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(Referência obtida automaticamente do Web of Science, por meio da informação sobre o financiamento pela FAPESP e o número do processo correspondente, incluída na publicação pelos autores.)

On the formation and annihilation of the singlet molecular metastables in an oxygen discharge

Texto completo
Autor(es):
Toneli, D. A. [1] ; Pessoa, R. S. [1, 2] ; Roberto, M. [1] ; Gudmundsson, J. T. [3, 4]
Número total de Autores: 4
Afiliação do(s) autor(es):
[1] Techonol Inst Aeronaut, Dept Phys, BR-12228900 Sao Jose Dos Campos, SP - Brazil
[2] Paraiba Valley Univ, Inst Res & Dev, BR-12244000 Sao Jose Dos Campos, SP - Brazil
[3] Univ Iceland, Inst Sci, IS-107 Reykjavik - Iceland
[4] KTH Royal Inst Technol, Sch Elect Engn, Dept Space & Plasma Phys, SE-10044 Stockholm - Sweden
Número total de Afiliações: 4
Tipo de documento: Artigo Científico
Fonte: JOURNAL OF PHYSICS D-APPLIED PHYSICS; v. 48, n. 32 AUG 19 2015.
Citações Web of Science: 22
Resumo

We describe a volume averaged global model for an inductively coupled RF oxygen discharge that considers an extensive reaction set that includes the species: O-2(X-3 Sigma(-)(g)), O-2(a(1)Delta(g)), O-2(b(1)Sigma(+)(g)), O-2(A(3)Sigma(+)(u), A('3)Delta u, c(1)Sigma(-)(u)), O-2(+), O-2(-), O(P-3), O(D-1), O+, O-, O-3, O-3(+), O-3(-), and electrons. We propose revised rate coefficients for some of the reactions and explore the densities of various species as a function of discharge pressure, in the pressure range 1-100 mTorr. We find that the O-2(a(1)Delta(g)) density can be lower than the O-2(b(1)Sigma(+)(g)) density in the pressure range from 2.5 to 80 mTorr. The relative reaction rates for formation and annihilation of O-2(a(1)Delta(g)) and O-2(b(1)Sigma(+)(g)) are evaluated and the most important reactions are indicated. The O- loss process is also studied. The results show that O-2(a(1)Delta(g)) has only a small contribution to the loss of the negative ion O-, while electron impact detachment is a very effective loss process at low pressure (<2 mTorr) and detachment by the oxygen atom O(P-3) and the metastable singlet O-2(b(1)Sigma(+)(g)) are the most effective loss process up to roughly 50 mTorr where charge exchange becomes the most effective process for O- loss. (AU)

Processo FAPESP: 13/03401-6 - Transporte de linhas de campo magnético e de partículas em tokamaks e modelagem de plasmas para estudo de deposição e corrosão
Beneficiário:Marisa Roberto
Linha de fomento: Auxílio à Pesquisa - Regular