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(Reference retrieved automatically from Web of Science through information on FAPESP grant and its corresponding number as mentioned in the publication by the authors.)

Effect of thermal treatment temperature on the crystallinity and morphology of LiTaO3 thin films prepared from polymeric precursor method

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Simões, A. Z. ; Gonzalez, A. H. ; Zaghete, M. A. ; Longo, E. ; Varela, J. A. [5]
Total Authors: 5
Document type: Journal article
Source: Journal of Electroceramics; v. 13, n. 1-3, p. 353-359, jul. 2004.
Field of knowledge: Engineering - Materials and Metallurgical Engineering

Lithium tantalate thin films (LiTaO3) with (50:50) stoichiometry were prepared by spin coating method using a polymeric organic solution. The films were deposited on silicon (100) substrates with 4 layers. The substrates were previously cleaned and then the solution of lithium tantalate was deposited by adjusting the speed at 5000 rpm. The thin films deposited were thermally treated from 350 to 600C for 3 hours in order to study the influence of the thermal treatment temperature on the crystallinity, microstructure, grain size and roughness of the final film. X-ray diffraction (XRD) results showed that the films are polycrystalline and secondary phases free. The thickness of films was observed by scanning electron microscopy (SEM). The atomic force microscopy (AFM) studies showed that the grain size and roughness are strongly influenced by thermal treatment. (AU)

FAPESP's process: 00/01991-0 - Synthesis and Characterization of Ferroelectric Thin Films and Ceramics
Grantee:José Arana Varela
Support Opportunities: Research Projects - Thematic Grants