Advanced search
Start date
(Reference retrieved automatically from Web of Science through information on FAPESP grant and its corresponding number as mentioned in the publication by the authors.)

DLC deposition inside of a long tube by using the pulsed-DC PECVD process

Full text
Pillaca, E. J. D. M. [1] ; Ramirez, M. A. [1, 2] ; Gutierrez Bernal, J. M. [3] ; Lugo, D. C. [1] ; Trava-Airoldi, V. J. [1]
Total Authors: 5
[1] Natl Inst Space Res, Sensors & Mat Associated Lab, Sao Jose Dos Campos, SP - Brazil
[2] Univ Paraibas Valley, UNIVAP, Sao Jose Dos Campos, SP - Brazil
[3] Univ Nacl Colombia, Fac Ingn, Bogota - Colombia
Total Affiliations: 3
Document type: Journal article
Source: SURFACE & COATINGS TECHNOLOGY; v. 359, p. 55-61, FEB 15 2019.
Web of Science Citations: 3

In this study, the pulsed-DC PECVD deposition system was used to produce Diamond-like carbon (DLC) film on the internal surface of a long metal tube (200 cm in length and 10 cm in diameter) employed as the deposition chamber itself. Firstly, the features of plasma discharges and the temperature distribution along the tube external surface were studied using argon, silane, and acetylene. The experimental results demonstrate that a stable discharge can be established inside the tube. It was found that when the precursor gas is employed, a temperature gradient on the tube surface is formed. Secondly, PECVD experiments regarding DLC film deposition inside the inner surface of the tube are described. For this purpose, polished stainless steel and silicon wafer samples were mounted on the inside tube surface for subsequent analysis of the coatings. It was found that the growth rate and the structure properties of the DLC film varied along the axial direction of the tube. However, surfaces of DLC film with high sp(3) content provided better tribological characteristics. These results were mainly attributed to complex processes of local dissociation and activation happened by collision between the electrons and neutrals. (AU)

FAPESP's process: 15/09781-0 - Study of DLC film growth inside of long tubes by pulsed-DC PECVD method
Grantee:Elver Juan de Dios Mitma Pillaca
Support Opportunities: Scholarships in Brazil - Post-Doctoral
FAPESP's process: 12/15857-1 - Scientific studies and innovation application on CVD diamond, DLC and carbon nanostructures obtained by chemical vapor deposition technique
Grantee:Vladimir Jesus Trava-Airoldi
Support Opportunities: Research Projects - Thematic Grants