(EN) AUTOMATIC APPARATUS FOR DEPOSITING THIN FILMS

(EN) The invention relates to an automatic apparatus for depositing thin films, which comprises a micro-controlled structure that can be programmed using a panel (100), said apparatus having an upper surface provided with a mechanical arm (10) which is actuated by servomotors (Sm) for operation on the X, Y and Z axes in order to collect and treat substrates (200), a claw (20) disposed on the free end of the arm (10), which holds the specimen until the end of the deposition cycles and permits electrical contact with one of the poles of the source for the application of a voltage during electrodeposition, and a support (30) for precursor solution containers (110) to be placed on the upper surface of the apparatus, wherein SILAR (Successive Ionic Layer Absorption and Reaction), dip-coating and electrodeposition deposition techniques are performed on the same specimen using a single apparatus, making it possible to deposit layers of different materials using different techniques, as well as by applying hybrid techniques using various materials at the same time.