Development of Polymer Based OptoElectroMechanical Microaccelerometers

Abstract

This research plan attempts to provide the necessary skills for a very promising undergraduate student to master the basics on development of microsensors. It approaches practically all steps necessary for the development of a relatively new type of microaccelerometer based on opto-electro-mechanical effects and fabricated with polymer. The design step includes an analytical modeling of the microsystem and a computational simulation based on the deduced analytical equations in order to stablish adequate functional dimensions for the device. The fabrication step involves conventional microfabrication techniques commonly used in microelectronics with some modifications, and includes several structures made of photopolymer such as: guide frame for the laser beam or support for optical fiber; proof mass suspended by four springs; structure to fixate a photodiode. The characterization step includes static and dynamical techniques commonly used for accelerometers, as well as some photodetection means necessary for this configuration. Since this is a relatively recent type of accelerometer with several potential applications, this work offers the opportunity of continuation as a research for a Master's (or Doctor's) Degree.