Microfabrication and optimization of silicon nitride optical resonators
Optimization of Plasma Etching of Lithium Niobate and Silicon Nitride Thin Film
Production of devices for integrated quantum photonics and sensors using femtoseco...
Scientific MUE: acquisition of a 100 kV electron beam nanolithography system for h...
Microfabrication and optimization of lithium niobate integrated optical cavities
Fabrication of Lasers with Coupled- Microresonators-Selective-Mirrors on Heterog...
Acquisition of a raith e-line system of electron beam lithography: nanofabrication...