Deposition of diamond-like carbon films on metal substrates by plasma immersion ion implantation technique

Abstract

Diamond-like carbon (DLC) films are a part of a family of materials called advanced materials, because they possess physical and chemical properties that make it possible to be used in a great variety of applications with high added value. Their explored properties include high wear resistance, low friction coefficient, chemical inertness, infrared transparency, high electrical resistance and low dielectric constant.The DLC films will be deposited on metallic substrates, such as the stainless steel, aluminum alloys and titanium alloys by means of the technique of plasma immersion ion implantation (PIII) using the methane and acetylene gases. Hybrid treatments composing the PIII with magnetron sputtering of carbon targets will be carried out also, controlling the hydrogen content inside the film and consequently the hardness of the deposited material.After the deposition of the films, characterizations including its structural, morphological, mechanical and tribological properties will be carried out, using the techniques such as: Raman spectroscopy, AFM, RBS, profiler and pin-on-disc. The treatments for PIII and PIII + magnetron sputtering will be carried out in the Associated Plasma Laboratory (LAP) of INPE, and the characterizations mentioned above in laboratories with which the group of LAP maintains scientific cooperation. (AU)