Fabrication and characterization of devices and systems based on hybrid nanomembranes

Abstract

Nanomembranes are freestanding nanostructures with mescopic thicknesses and with lateral dimensions in the macroscopic range. By strain and stress engineering inside the nanomembranes, self-assembled three-dimensional (3D) structures, such as microtubes and micro-ribbons, can be formed. Since the patterning methods used for manufacturing the nanomembranes are the same ones employed in standard microfabrication processes, the creation of 3D devices based on microtubes and micro-ribbons is a typical case where bottom-up and top-down methods are combined to give rise to novel technologies. In this proposal, we intend to implement and consolidate the processes of synthesis, patterning and characterization of hybrid organic/inorganic nanomembranes, as well as their application in electronic, electrochemical and microfluidic devices at LNNano/CNPEM. Three categories of demonstrators are proposed in order to solidify the fabrication processes: a) Ultra-compact elements, such as supercapacitors and organic transistors, which use the mechanical flexibility of the nanomembranes to reduce the devices footprint. b) Sensors that exploit the quasi-bidimensional nature of the nanomembranes to improve their performance and to incorporate different functionalities. c) Hybrid organic/inorganic heterojunctions, that uses the mechanical flexibility of the nanomembrane, associated with their patterning and integration capabilities, to generate robust devices on-a-chip exhibiting novel physical and chemical properties. (AU)