RF MEMS for millimetric waves using commercial CMOS process

Abstract

The goal of this project is to design, model, fabricate and test microelectromechanical systems for RF (RF MEMS), envisioning applications in reconfigurable RF circuits for the millimeter-wave frequencies range, above 30 GHz, using post-processing to the release the interconnecting layers (back end) of a commercial CMOS technology. This project aims to develop devices in the state of the art, with great commercial potential, since they are based on CMOS technology that is mature and reliable. Therefore, the devices will be developed for fast and simple transfer to the industry, allowing its use in modern applications in millimeter waves. The development of this project will be at the Laboratory of Microelectronics (LME) of the Polytechnic School of the University of São Paulo, where currently there is no consolidated research line related to the full development of RF MEMS, involving the design, manufacture and testing. The development of structures and processes proposed will yield the creation of innovative devices in Brazil. The fabrication of the devices will be made in foundries outside Brazil, however, the know-how of the design, modeling and testing of the RF MEMS using CMOS will remain in Brazil. In addition, the post-processing step, crucial to realize the RF MEMS will be done entirely at LME. From the Brazilian scientific point of view, this project will allow the participation of Brazilian researchers in the development of a new technology in the state of the art, actively contributing to cutting-edge research with great interest in global commerce. This is especially difficult and extremely important in the Brazilian microelectronics context. From a technological standpoint, the development of passive circuits that are essential for a fully integrated front-end operating in mmW is expected, aiming at high performance and low cost, benefiting from the advantages of the RF MEMS. It is intended to use the concept of distributed MEMS under coplanar waveguide transmission lines (CPW), concept which is being patented by the proposer of this project, to perform adjustable phase shifters with low losses and low power consumption, small size and high power capability. The same concept should be used for the development of duplexers and variables power dividers. Also, high efficiency antennas and antenna arrays will be developed in CMOS technology. This project will establish an unprecedented line of research in Brazil, based on front-line technology and it will establish the necessary basis for the development of various MEMS, especially RF MEMS, in a competitive and commercial way. (AU)