Multiuser equipment approved in grant 2012/50259-8: atomic layer deposition

Grant number:	18/24380-0
Support Opportunities:	Multi-user Equipment Program
Duration:	February 01, 2019 - January 31, 2026
Field of knowledge:	Engineering - Electrical Engineering - Electrical, Magnetic and Electronic Measurements, Instrumentation

Principal Investigator:	Eunezio Antonio de Souza
Grantee:	Eunezio Antonio de Souza

Host Institution:	Instituto Mackenzie de Pesquisas em Grafeno e Nanotecnologias. Universidade Presbiteriana Mackenzie (UPM). Instituto Presbiteriano Mackenzie. São Paulo , SP, Brazil

Associated research grant:	12/50259-8 - Graphene: photonics and opto-electronics: UPM-NUS collaboration, AP.SPEC

As informações de acesso ao Equipamento Multiusuário são de responsabilidade do Pesquisador responsável
EMU web page:	https://www.mackenzie.br/mackgraphe/laboratorio-multiusuario
Type of equipment:	Processos Físicos - Litografia - Laser Processos Físicos - Litografia - Óptica Processos Físicos - Deposição filmes finos - Evaporador
Manufacturer:	Quantum Design
Model:	GEM-Star XT-S

Abstract

This equipment allows the manufacture of electro-optical devices using thin film deposition technique of atomic thickness. With it, it will be possible to deposit dielectric layers of the order of a few nanometers in capacitive structures based on two-dimensional materials. (AU)

Articles published in Agência FAPESP Newsletter about the research grant:

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